Evidence map›Paper›PMID 40428726›Full record

ArticleMicromachines2025

Influence of Lithography Process Parameters on Continuous Surface Diffractive Optical Elements for Laser Beam Shaping.

Wenjing Liu, Axiu Cao, Junbo Liu, Hui Pang, Qiling Deng, Jian Wang, Song Hu

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

7 authors.

Wenjing LiuNational Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu 610209, China.
Axiu CaoNational Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu 610209, China.ORCID 0000-0003-1943-184X
Junbo LiuNational Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu 610209, China.
Hui PangNational Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu 610209, China.
Qiling DengNational Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu 610209, China.
Jian WangNational Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu 610209, China.ORCID 0000-0002-1275-7954
Song HuNational Key Laboratory of Optical Field Manipulation Science and Technology, Chinese Academy of Sciences, Chengdu 610209, China.

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

To address the demand for laser beam-shaping techniques, we developed a one-step exposure process based on moving-mask lithography for the fabrication of a continuous-surface diffractive optical element (DOE) for laser beam shaping. The fabrication process is described in detail, and the influence of key parameters, such as pre-baking conditions, exposure gaps, development conditions, and post-baking conditions, of the lithography process on the microstructure profile of the DOE is analyzed. The reliability of the preparation method was verified through optical performance experiments. The speckle contrast, uniformity, and diffraction efficiency of the prepared linear beam-shaping element are 4.2%, 97.3%, and 87%.

Indexed as

continuous surfacediffractive optical elementlaser beam shapingmoving-mask lithography

Identifiers

PMID40428726
PMCPMC12114134

What OpenQuestion holds

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.