ArticleMicromachines2025
Research on Pneumatic Proportional Pressure Valve Based on Silicon Microfluidic Chip with V-Shaped Electrothermal Microactuator.
Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
1 citing paper in PubMed.
- CMOS-Compatible Micro Photovoltaic Generator with Post-Processing Enhanced Optical Absorption.Micromachines · 2025Article
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Authors and funding
3 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
This study presents a pneumatic proportional pressure valve employing a silicon microfluidic chip (SMC) integrated with a V-shaped electrothermal microactuator, aiming to address the limitations of traditional solenoid-based valves in miniaturization and high-precision control. The SMC, fabricated via MEMS technology, leverages the thermal expansion of microactuator ribs to regulate pressure through adjustable orifices. A first-order transfer function between input voltage and displacement of the microactuator was derived through theoretical modeling and validated via COMSOL Multiphysics 5.2a simulations. Key geometric parameters of the actuator ribs-cross-section, number, inclination angle, width, span length and thickness-were analyzed for their influence on lever mechanism displacement, actuator displacement, static gain and time constant. AMESim 16.0-based simulations of single- and dual-chip valve structures revealed that increasing ζ shortens step-response rise time, while reducing τ improves hysteresis. Experimental validation confirmed the valve's static and dynamic performance, achieving a step-response rise time of <40 ms, linearity within the 30-60% input voltage range, and effective tracking of sinusoidal control signals up to 8 Hz with a maximum pressure deviation of 0.015 MPa. The work underscores the potential of MEMS-based actuators in advancing compact pneumatic systems, offering a viable alternative to conventional solenoids. Key innovations include geometry-driven actuator optimization and dual-chip integration, providing insights into high-precision, low-cost pneumatic control solutions.
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Registered trials
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