ArticleNanomaterials (Basel, Switzerland)2025
Accurate Deep Potential Model of Temperature-Dependent Elastic Constants for Phosphorus-Doped Silicon.
Article in Nanomaterials (Basel, Switzerland), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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Who cites it
2 citing papers in PubMed.
- BO-LSTM-Based TDE Precise Estimation Model of Capacitive MEMS-Gyros Using Thermal-Induced Physical Characteristics Variation Analysis.Micromachines · 2026Article
- Molecular Dynamics Simulation of Texture Contact Friction Between Crystalline Silicon Layers for Application in Micro-Nano System Devices.Molecules (Basel, Switzerland) · 2025Article
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Authors and funding
7 authors.
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Abstract
Accurate predictions of elastic properties under varying doping concentrations and temperatures are critical for designing reliable silicon-based micro-/nano-electro-mechanical systems (MEMS/NEMS). Empirical potentials typically lack accuracy for elastic predictions, whereas density functional theory (DFT) calculations are precise but computationally expensive. In this study, we developed a highly accurate and efficient machine learning-based Deep Potential (DP) model to predict the elastic constants of phosphorus-doped silicon (Si
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Registered trials
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