ArticleMicrosystems & nanoengineering2025
Investigation of viscous damping in perforated MEMS devices.
Zeyu Jia et al.PubMed ↗Full text ↗Publisher ↗
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ArticleMicrosystems & nanoengineering2025
Zeyu Jia et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.