Bioinspired flow-sensing capacitive microphone.

Johar Pourghader, Weili Cui, Mahdi Farahikia, Junpeng Lai, Morteza Karimi, Changhong Ke, Ronald Miles

Abstract read

In one paragraph

Article in The Journal of the Acoustical Society of America, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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0citing papers in PubMed

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1 · What the graph read from it

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3 · Its place in the literature

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0 citing papers in PubMed.

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4 · The record

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5 · Who and what money

Authors and funding

7 authors.

Johar PourghaderDepartment of Mechanical Engineering, Binghamton University, Binghamton, New York 13902, USA.ORCID 0000-0002-3486-8153

Weili CuiDepartment of Mechanical and Facility Engineering, State University of New York, Maritime College, Bronx, New York 10465, USA.

Mahdi FarahikiaDivision of Engineering Programs, State University of New York at New Paltz, New Paltz, New York 12561, USA.ORCID 0000-0002-0867-868X

Junpeng LaiDepartment of Mechanical Engineering, Binghamton University, Binghamton, New York 13902, USA.ORCID 0000-0003-1130-3042

Morteza KarimiDepartment of Mechanical Engineering, Binghamton University, Binghamton, New York 13902, USA.ORCID 0000-0002-8745-0818

Changhong KeDepartment of Mechanical Engineering, Binghamton University, Binghamton, New York 13902, USA.ORCID 0000-0002-5170-9859

Ronald MilesDepartment of Mechanical Engineering, Binghamton University, Binghamton, New York 13902, USA.ORCID 0000-0001-7245-9345

Funding

Capacitive Pressure/Velocity Probe for Acoustic Measurements in the Human Ear CanalR01DC017720 · NIDCD · STATE UNIVERSITY OF NY,BINGHAMTON · PI MILES, RONALD N, SHERA, CHRISTOPHER A · 2019 to 2023

$1.5M

NIDCD NIH HHS R01 DC017720

6 · The paper itself

Abstract

Inspired by the auditory systems of small animals, such as spiders, the tachinid fly, Ormia ochracea, and mosquitoes, a novel low-noise, flow-sensing capacitive MEMS microphone capable of sensing acoustic particle velocity is introduced. Unlike conventional microphones that have a diaphragm for sensing sound pressure, this design consists of a thin, porous, movable structure that is intended to be driven by viscous forces as a result of the sound-induced flow. This viscous force then rotates the movable structure around a middle central hinge and creates a change in capacitance caused by a relative motion between neighboring beams. The whole structure is made of one layer of silicon using a silicon-on-insulator (SOI) wafer using photolithography technology with a device layer thickness of 5 μm. The movable part has dimensions of 0.7 mm × 1.2 mm and is placed above a cavity inside the bulk silicon that facilitates the flow of sound particles. This microphone responds to flow (a vector) rather than pressure (a scalar). Ultimately, experimental results demonstrate a sensitivity of approximately 5 mV/Pa, a noise floor between 10-4 and 10-5 Pa/Hz, and directivity ratios reaching up to 77 at 2000 Hz, underscoring its potential for high-performance acoustic applications.

Identifiers

PMID40408298

DOI10.1121/10.0036772

PMCPMC12103255

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.