ArticleMaterials (Basel, Switzerland)2025
Influence of Deposition Temperature on Microstructure and Properties of Tantalum Oxide Sputtered Coatings.
Article in Materials (Basel, Switzerland), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
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Who cites it
1 citing paper in PubMed.
- Tantalum-Based Nanomaterials: From Properties to Biomedical Applications.Advanced materials (Deerfield Beach, Fla.) · 2026Review
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2 authors.
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Abstract
To increase the wear and corrosion resistance of (α + β) titanium-aluminium-vanadium (Ti6Al4V) alloy, ceramic tantalum oxide coatings were deposited by direct current (DC) magnetron sputtering at three different substrate temperatures-400, 450, and 500 °C. The crystallographic structure, surface morphology, chemical compositions, film adhesion, and hardness of the coatings were described using XRD, SEM, EDS, scratch tests, and microhardness measurements. The samples' ability to withstand corrosion was assessed using electrochemical studies. Results revealed that thin films have an amorphous or crystalline structure dependent on temperature. The film's thicknesses varied between 560 and 600 nm. With the increase in deposition temperature, the hardness of the film rose. All oxide coatings were tightly adherent to the titanium alloy substrate, and critical force increased from about 8.6 up to 20 N when the temperature rose from 400 to 500 °C. During the polarisation investigations, after 1 h of immersion, a drop in current density (j
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