ArticleNanomaterials (Basel, Switzerland)2025
Monodisperse SiO
Article in Nanomaterials (Basel, Switzerland), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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8 authors.
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Abstract
The atomic level polishing of a material surface affects the accuracy of devices and the application of materials. Silica slurries play an important role in chemical mechanical polishing (CMP) by polishing the material surface. In this study, an efficient and controllable Stöber approach was developed to synthesize uniform monodisperse silica spheres with different cationic surfactants. The obtained silica spheres exhibited a regular shape with a particle size of 50-150 nm and were distributed evenly and narrowly. The highest surface specific area of the silica spheres was approximately 1155.9 m
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