ArticleNanomaterials (Basel, Switzerland)2025
Ellipsometric Surface Oxidation Model of ALD-Grown Vanadium Oxide Mixed-Valence System.
Xiaojie Sun, Shuguang Wang, Qingyuan Cai, Jingze Liu, Changhai Li, Ertao Hu, Jing Li, Songyou Wang, Yuxiang Zheng, Liangyao Chen and 1 more
Abstract read
In one paragraphArticle in Nanomaterials (Basel, Switzerland), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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11 authors.
Xiaojie SunState Key Laboratory of Photovoltaic Science and Technology, Department of Optical Science and Engineering, School of Information Science and Technology, Fudan University, Shanghai 200433, China.
Shuguang WangState Key Laboratory of Photovoltaic Science and Technology, Department of Optical Science and Engineering, School of Information Science and Technology, Fudan University, Shanghai 200433, China.
Qingyuan CaiShanghai Key Laboratory of Optical Coatings and Spectral Modulation, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China.ORCID 0000-0001-6973-6604 Jingze LiuState Key Laboratory of Photovoltaic Science and Technology, Department of Optical Science and Engineering, School of Information Science and Technology, Fudan University, Shanghai 200433, China.
Changhai LiState Key Laboratory of Photovoltaic Science and Technology, Department of Optical Science and Engineering, School of Information Science and Technology, Fudan University, Shanghai 200433, China.
Ertao HuCollege of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China.ORCID 0000-0002-7659-9422 Jing LiState Key Laboratory of Photovoltaic Science and Technology, Department of Optical Science and Engineering, School of Information Science and Technology, Fudan University, Shanghai 200433, China.ORCID 0000-0001-9019-7449 Songyou WangState Key Laboratory of Photovoltaic Science and Technology, Department of Optical Science and Engineering, School of Information Science and Technology, Fudan University, Shanghai 200433, China.ORCID 0000-0002-4249-3427 Yuxiang ZhengState Key Laboratory of Photovoltaic Science and Technology, Department of Optical Science and Engineering, School of Information Science and Technology, Fudan University, Shanghai 200433, China.
Liangyao ChenState Key Laboratory of Photovoltaic Science and Technology, Department of Optical Science and Engineering, School of Information Science and Technology, Fudan University, Shanghai 200433, China.
Youngpak LeeState Key Laboratory of Photovoltaic Science and Technology, Department of Optical Science and Engineering, School of Information Science and Technology, Fudan University, Shanghai 200433, China.ORCID 0000-0001-7601-6437 Funding
Eastern Talent Plan Youth Project 2022 noneNational Natural Science Foundation of China 62275053, 62275256, U2230108, 61427815, 11674062Open Fund of Shanghai Key Laboratory of Optical Coatings and Spectral Modulation noneScience and Technology Commission of Shanghai Municipality STCSM-22142200200
6 · The paper itselfAbstract
Vanadium and oxygen form a complex system of vanadium oxides with multiple phases and mixed valency, increasing the difficulty of characterization. In this work, amorphous vanadium oxide thin films with mixed valence states were fabricated by atomic layer deposition, and then post-annealing was conducted for crystalline films. For the surface analysis of this mixed-valence system, X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) were employed. However, XPS is only able to quasi-quantitatively determine the surface-proximity oxidation states. To account for the inadequacy of surface-sensitive XPS and AES techniques, a surface oxidation model (SOM) was proposed for the ellipsometric modeling of the mixed-valence system. Furthermore, by conducting air thermal oxidation (ATO) experiments, the four sets of fitting parameters of SOM were decreased to three, lowering the system complexity. This study is expected to help with the analysis of vanadium oxide mixed-valence systems and other multivalent metal oxide systems.
Indexed as
atomic layer depositionmixed-valence systemoptical propertyoptical thin filmspectroscopic ellipsometrysurface oxidationvanadium oxides
Identifiers
PMID40358262
PMCPMC12073714
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