ArticleSmall methods2025
Tailoring in-Plane Permittivity Gradients by Shadow Mask Molecular Beam Epitaxy.
Article in Small methods, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
1 citing paper in PubMed.
- Tailoring in-Plane Permittivity Gradients by Shadow Mask Molecular Beam Epitaxy.Small methods · 2025Article
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5 authors.
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Abstract
Infrared (IR) gradient permittivity materials are the potential building blocks of miniature IR-devices such as an on-chip spectrometer. The manufacture of materials with permittivities that vary in the horizontal plane is demonstrated using shadow mask molecular beam epitaxy in Si:InAs films. However, to be useful, the permittivity gradient needs to be of high crystalline quality and its properties need to be tunable. In this paper, it is shown that it can control the permittivity gradient length and steepness by varying the shadow mask thickness. Samples grown with similar growth parameters and with 200 and 500 µm mask thicknesses show permittivity gradient widths of 18 and 39 µm on the flat mesa on one side and 11 and 23 µm on the film slope on the other side, respectively. The gradient steepnesses are 23.3 and 11.3 cm
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