Evidence map›Paper›PMID 40295520›Full record

ArticleMicrosystems & nanoengineering2025

A high-performance 10 mm diameter MEMS fast steering mirror with integrated piezoresistive angle sensors for laser inter-satellite links.

Wenli Xue, Yichen Liu, Xingwang Zhu, Mingkun Wang, Zhichao Weng, Yongquan Su, Yi Yang, Hongfeng Zhao, Yang Wang, Hao Chen and 2 more

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Microsystems & nanoengineering, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.

0numbers the graph read from it
0cells of the map it votes in
2citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

2 citing papers in PubMed.

  1. Article
  2. Review
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

12 authors.

Wenli XueState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China.
Yichen LiuState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China.
Xingwang ZhuShanghai Industrial µTechnology Research Institute, Shanghai, China.
Mingkun WangMExpert Technologies Co. Ltd, Shanghai, China.
Zhichao WengShanghai Industrial µTechnology Research Institute, Shanghai, China.
Yongquan SuState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China.
Yi YangShanghai Industrial µTechnology Research Institute, Shanghai, China.
Hongfeng ZhaoShanghai Industrial µTechnology Research Institute, Shanghai, China.
Yang WangState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China.
Hao ChenState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China.
Lihao WangState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China. lhwang@mail.sim.ac.cn.
Zhenyu WuState Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China. zhenyu.wu@mail.sim.ac.cn.

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

This paper presents a compact and high-performance piezoelectric micro-electro-mechanical system (MEMS) fast steering mirror (FSM) designed for use in laser inter-satellite links (ISLs). The FSM features a large optical aperture of 10 mm and is batch fabricated using an 8-inch wafer-level eutectic bonding process, packaged into a volume of 26 × 22 × 3 mm

Identifiers

PMID40295520
PMCPMC12038044

What OpenQuestion holds

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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.