Evidence map›Paper›PMID 40293019›Full record

ArticleSensors (Basel, Switzerland)2025

A

Zhuoyue Duan, Tao Wang, Wei Ji, Lihui Feng, Peng Yin, Jihua Lu, Litong Yin

Abstract read
In one paragraph

Article in Sensors (Basel, Switzerland), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.

0numbers the graph read from it
0cells of the map it votes in
2citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

2 citing papers in PubMed.

  1. Article
  2. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

7 authors.

Zhuoyue DuanSchool of Information Science and Engineering, Shandong University, Qingdao 266237, China.
Tao WangSchool of Information Science and Engineering, Shandong University, Qingdao 266237, China.ORCID 0009-0002-0041-6076
Wei JiSchool of Information Science and Engineering, Shandong University, Qingdao 266237, China.ORCID 0000-0001-8460-9312
Lihui FengSchool of Optoelectronic, Beijing Institute of Technology, Beijing 100081, China.ORCID 0000-0001-9171-8998
Peng YinSchool of Cyberspace Security, University of Chinese Academy of Sciences, Beijing 100049, China.
Jihua LuSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.ORCID 0000-0001-8061-4907
Litong YinSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.

Funding

Open Fund of IPOC 2021 (BUPT) Open Fund of IPOC 2021 (BUPT)the National Key Research and Development Program 2022YFB2802403the National Natural Science Foundation of Shandong Province ZR2021MF018
6 · The paper itself

Abstract

Passive-wireless surface-acoustic-wave (SAW) micro-pressure sensors are suitable for extreme scenarios where wired sensors are not applicable. However, as the measured pressure decreases, conventional SAW micro-pressure sensors struggle to meet expected performance due to insufficient sensitivity. This article proposes a a method of using an A2-mode Lamb SAW sensor and introduces an inertial structure in the form of a cantilever beam to enhance sensitivity. An MEMS-compatible manufacturing process was employed to create a multi-layer structure of SiO2, AlN, and SOI for the SAW micro-pressure sensor. To investigate the operational performance of the SAW micro-pressure sensor, a micro-pressure testing system was established. The experimental results demonstrate that the sensor exhibits high sensitivity to micro-pressure, validating the effectiveness of the proposed design.

Indexed as

cantilever beamMEMS-compatible manufacturing processpassive wirelessSAW micro-pressure sensor

Identifiers

PMID40293019
PMCPMC11946567

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.