Evidence map›Paper›PMID 40292831›Full record

ArticleSensors (Basel, Switzerland)2025

Resonant Drive Techniques for Electrostatic Microelectromechanical Systems (MEMS): A Comparative Study.

Rana Abdelrahman, Alaaeldin Elhady, Yasser S Shama, Mohamed Abdelrahman, Alexis Jollivet, Dogu Ozyigit, Mustafa Yavuz, Eihab M Abdel-Rahman

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Sensors (Basel, Switzerland), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

8 authors.

Rana AbdelrahmanSystems Design Engineering, University of Waterloo, 200 University Ave. W, Waterloo, ON N2L 3G1, Canada.
Alaaeldin ElhadySystems Design Engineering, University of Waterloo, 200 University Ave. W, Waterloo, ON N2L 3G1, Canada.ORCID 0000-0002-6963-8462
Yasser S ShamaSystems Design Engineering, University of Waterloo, 200 University Ave. W, Waterloo, ON N2L 3G1, Canada.ORCID 0000-0001-7068-8494
Mohamed AbdelrahmanSystems Design Engineering, University of Waterloo, 200 University Ave. W, Waterloo, ON N2L 3G1, Canada.
Alexis JollivetElectronics and Digital Technology Department, Polytech Nantes, University of Nantes, 44300 Nantes, France.
Dogu OzyigitWaterloo Institute for Nanotechnology (WIN), University of Waterloo, Waterloo, ON N2L 3G1, Canada.
Mustafa YavuzWaterloo Institute for Nanotechnology (WIN), University of Waterloo, Waterloo, ON N2L 3G1, Canada.
Eihab M Abdel-RahmanSystems Design Engineering, University of Waterloo, 200 University Ave. W, Waterloo, ON N2L 3G1, Canada.ORCID 0000-0002-3709-7593

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Electrostatic actuation is widely employed in microelectromechanical systems (MEMS) due to its distinct advantages. However, it requires high voltage, typically provided by a power supply and a high voltage amplifier, which is limited in gain, especially at high frequencies. Various methods have been proposed to amplify the voltage signal fed into the system by coupling it in series to an LC tank circuit. In this work, we analyze and compare three methods, resonance matching, multi-frequency excitation, and amplitude modulation. We also compare their performance to that of a voltage amplifier. We demonstrate that resonant circuits significantly enhance performance, offering a more effective solution for high-frequency MEMS actuation.

Indexed as

actuatorsamplitude modulationelectrostatic MEMSmulti-frequencyNEMSresonance matchingresonant drivesensorsvoltage amplification

Identifiers

PMID40292831
PMCPMC11944924

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.