ArticleSensors (Basel, Switzerland)2025
Attofarad-Class Ultra-High-Capacitance Resolution Capacitive Readout Circuits.
Article in Sensors (Basel, Switzerland), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
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1 citing paper in PubMed.
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Authors and funding
10 authors.
Funding
Abstract
In order to meet the application requirements for high-precision and low-noise accelerometers in micro-vibration measurement and navigation fields, this paper presents the design and testing of an ultra-high-capacitance resolution capacitive readout circuit with attofarad-level precision. First, a differential charge amplifier circuit is employed for the first stage of capacitance detection. To suppress noise interference in the circuit, a frequency-domain modulation technique is utilized to mitigate low-frequency noise. Subsequently, a differential subtraction circuit is implemented to reduce common-mode noise. Additionally, an improved filtering circuit is designed to suppress noise interference in the final stage. The test results indicate that the designed circuit operates at a carrier frequency of 1 MHz, achieving a capacitance resolution of up to 0.103 aF/Hz1/2 and a noise floor of 25.6 μg/Hz1/2, thereby meeting the requirements for high-precision and low-noise capacitance detection in MEMS accelerometers.
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