Wafer Bonding of GaAs and SiC via Thin Au Film at Room Temperature.

Effective thermal management is a critical challenge in achieving high-power output for semiconductor laser devices. A key factor in laser device packaging is the bonding between the laser device on a GaAs substrate and a heat spreader, typically composed of high thermal conductivity materials such as SiC. Conventional soldering methods introduce thick bonding layers with relatively low thermal conductivity, resulting in high thermal resistance at the interface. In this study, we demonstrate the room temperature bonding of GaAs and SiC via a 30 nm thick Au layer, eliminating the need for a thermal reaction bonding layer or vacuum process. Using surface-activated bonding (SAB), GaAs and SiC were successfully bonded, with a strength comparable to bulk fracture. A uniform and ultrathin Au bonding interface significantly reduces thermal resistance compared to conventional soldering methods. These results highlight the potential of SAB with thin Au films as a promising approach for improving thermal management in high-power semiconductor laser devices.