ArticleMicromachines2025
Low Noise Feed-Through Compensation Circuit Design for Resonant MEMS Pressure Sensor.
Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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6 authors.
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Abstract
The feed-through effect of resonant pressure sensors usually introduces interfering noise signals, leading to the degradation of sensitivity, linearity, and other performances of the sensor test system. A low-noise charge amplifier and its feed-through compensation circuit are designed to realize high-precision measurements. The designed improved charge amplifier has a differential common-source structure as the output buffer stage, which can effectively reduce the output noise of the circuit while increasing the input impedance, thus improving the accuracy of the feed-through compensation coefficient. By establishing the equivalent circuit model of the sensor and analyzing the influence of the feed-through effect on the sensor test, the feed-through compensation circuit is designed to suppress the feed-through signal. Experimental testing of the sensor proves that the designed circuit can effectively suppress the feed-through effect of the sensor. The noise power spectral density of the improved charge amplifier is tested to be 26.74 nV/√Hz, which is a 65% reduction in noise density. The feed-through compensation circuit eliminates the interference frequency of 34,919 Hz introduced by the feed-through capacitor. Additionally, the resonance peak of the intrinsic resonance frequency of the pressure sensor is -40.75 dBV, which is reduced by 8 dBV compared with that before the feed-through compensation. The feed-through compensation circuit effectively reduces the feed-through interference signal of the sensor, improves the measurement accuracy of the test system, and provides technical support for the design of a low-noise, high-precision, stable, and reliable sensor test system.
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