Evidence map›Paper›PMID 40256533›Full record

ArticleACS omega2025

Spectroscopic Ellipsometry of Plasmonic Gratings-Ideal Parameters for Sensing and Subpicometer Measurement Uncertainty.

Deshabrato Mukherjee, Sven Burger, Thomas Siefke, Jeetendra Gour, Bernd Bodermann, Peter Petrik

Abstract read
In one paragraph

Article in ACS omega, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Review
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

6 authors.

Deshabrato MukherjeeInstitute for Technical Physics and Materials Science, HUN-REN Centre for Energy Research, Budapest 1121, Hungary.
Sven BurgerZuse Institute Berlin, Berlin 14195, Germany.ORCID https://orcid.org/0000-0002-3140-5380
Thomas SiefkeInstitute of Applied Physics, Friedrich Schiller University, Jena 07737, Germany.
Jeetendra GourInstitute of Applied Physics, Friedrich Schiller University, Jena 07737, Germany.ORCID https://orcid.org/0000-0002-0098-800X
Bernd BodermannPhysikalisch-Technische Bundesanstalt, Braunschweig 38116, Germany.
Peter PetrikInstitute for Technical Physics and Materials Science, HUN-REN Centre for Energy Research, Budapest 1121, Hungary.ORCID https://orcid.org/0000-0002-5374-6952

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Gold gratings were measured by spectroscopic ellipsometry in reflection mode and modeled by the finite element method to investigate the capabilities of optical dimensional metrology for plasmonic diffractive structures. The gratings were prepared by electron beam lithography using parameters determined by finite element simulations for significant variations of the amplitude ratio and phase shift of the polarized reflection coefficients to achieve high sensitivity for both the measurement of the grating dimensions and the sensing capabilities. The sensitivity largely depends on the values in the five-dimensional parameter space including the grating parameters such as the critical dimension, the period, and the thickness of the grating, as well as the measurement parameters comprising the wavelength and the angle of incidence. The best limit of detection values are in the picometer range for the critical dimension and the thickness of the overlayer, and ≈10

Identifiers

PMID40256533
PMCPMC12004160

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.