ArticleMicromachines2025
A Mode-Localized Micro-Electromechanical System Accelerometer with Force Rebalance Closed-Loop Control.
Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
2 citing papers in PubMed.
- Structure Design Optimization of a Differential Capacitive MEMS Accelerometer Based on a Multi-Objective Elitist Genetic Algorithm.Micromachines · 2026Article
- A novel multi-degree-of-freedom cascaded hybrid electro-mechanical resonator system with ultra-high sensitivity.Microsystems & nanoengineering · 2025Article
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Authors and funding
6 authors.
Funding
Abstract
This article proposes a force rebalance control scheme based on a mode-localized resonant accelerometer (ML-RXL), which is applied to address the limited measurement range problem of the ML-RXL. For the first time, an empirical response model of the weakly coupling resonators for the amplitude ratio output is established. Based on this, this paper builds an overall model of the force rebalance control system to analyze the sensitivity characteristics by simulations, which demonstrates that the scheme can effectively broaden the linear measurement range. It is demonstrated that the sensor exhibits a highly linear output within a measurement range of ±1 g, with a sensitivity of the feedback-control voltage output measured at 2.94 V/g. The measurement range is expanded by at least 6.7 times. Moreover, the results show that the minimum input-referred acceleration noise density of the sensor for the force rebalance control scheme is 3.29 μg/rtHz, and that the best bias instability is optimized to 5.34 μg with an integral time of 0.64 s.
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Registered trials
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