Evidence map›Paper›PMID 40128437›Full record

ArticleDiscover nano2025

Development of an innovative low-temperature PEALD process for stress-compensated TiO

Duy Thanh Cu, Kuan-Yu Ko, Wen-Hao Cho, Chao-Te Lee, Meng-Chi Li, Chien-Cheng Kuo

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Discover nano, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

6 authors.

Duy Thanh CuDepartment of Optics and Photonics/Thin Film Technology Center, National Central University, 300, Chung Da Rd, Chung Li, Taoyuan, 32001, Taiwan.
Kuan-Yu KoDepartment of Optics and Photonics/Thin Film Technology Center, National Central University, 300, Chung Da Rd, Chung Li, Taoyuan, 32001, Taiwan.
Wen-Hao ChoTaiwan Instrument Research Institute, National Applied Research Laboratories, Hsinchu, 300, Taiwan.
Chao-Te LeeTaiwan Instrument Research Institute, National Applied Research Laboratories, Hsinchu, 300, Taiwan.
Meng-Chi LiGeneral Education Center, Ming Chi University of Technology, New Taipei City, 24301, Taiwan.
Chien-Cheng KuoDepartment of Optics and Photonics/Thin Film Technology Center, National Central University, 300, Chung Da Rd, Chung Li, Taoyuan, 32001, Taiwan. cckuo@ncu.edu.tw.

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

This study presents a low-temperature plasma-enhanced atomic layer deposition (PEALD) technique for fabricating high-performance, stress-reduced anti-reflective coatings (ARCs). To the best of our knowledge, this is the first extensive study on titanium dioxide (TiO

Indexed as

AR coatingLow stressLow temperaturePE-ALD

Identifiers

PMID40128437
PMCPMC11933615

What OpenQuestion holds

Textmetadata
LicenceCC BY-NC-ND
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.