Anti-Interference Spectral Confocal Sensors Based on Line Spot.

Bo Wang, Jiafu Li, Mingzhe Luo, Fengshuang Liang, Jiacheng Hu

Abstract read

In one paragraph

Article in Sensors (Basel, Switzerland), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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0citing papers in PubMed

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1 · What the graph read from it

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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

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4 · The record

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5 · Who and what money

Authors and funding

5 authors.

Bo WangKey Laboratory of In-Situ Metrology, Ministry of Education, China Jiliang University, Hangzhou 310018, China.

Jiafu LiPrecision Measurement Laboratory, National Institute of Metrology, Beijing 100029, China.

Mingzhe LuoPrecision Measurement Laboratory, National Institute of Metrology, Beijing 100029, China.

Fengshuang LiangSchool of Mechanical and Power Engineering, Harbin University of Science and Technology, Harbin 150080, China.

Jiacheng HuKey Laboratory of In-Situ Metrology, Ministry of Education, China Jiliang University, Hangzhou 310018, China.

Funding

Key Laboratory of In-situ Metrology of the Ministry of Education China jiliang UniversityNational Key Research and Development Program 2022YFB3206004National Natural Science Foundation of China 52205579

6 · The paper itself

Abstract

Spectral confocal displacement sensors are non-contact optoelectronic sensors widely utilized for their high accuracy, speed, and ability to measure diverse surfaces. However, challenges including vibration, angular deflection, and surface quality variations can reduce sensor stability and accuracy when performing measurements such as lithium battery wafer thickness, wafer warpage, and optical component surface topography. This study proposes a line-spot-based measurement method using a binary diffractive lens and cylindrical lens with a 20× objective, and then the overall structure is simulated and optimized by using ZEMAX, which realizes a confocal measurement system with a measurement range of 800 μm, line spot length of 3.8 mm, and width of 0.2 mm. The system, calibrated with a nanometer displacement stage, achieved 30 nm resolution and significantly improved dynamic stability (standard deviation (SD) of 0.013 μm) compared to a point spectral confocal sensor (SD of 0.064 μm). The results indicate the proposed sensor exhibits improved stability during scanning measurements.

Indexed as

anti-interferenceline spotspectral confocalstabilitysurface profile measurement

Identifiers

PMID40096099

DOI10.3390/s25051337

PMCPMC11902799

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