A tip-tilt-piston electrothermal micromirror array with integrated position sensors.

Anrun Ren, Yingtao Ding, Hengzhang Yang, Qiangqiang Liu, Teng Pan, Ziyue Zhang, Huikai Xie

Abstract read

In one paragraph

Article in Microsystems & nanoengineering, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it

0cells of the map it votes in

1citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

A Review: Absolute Linear Encoder Measurement Technology.Sensors (Basel, Switzerland) · 2025
Review

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

7 authors.

Anrun RenSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, 100081, Beijing, China.

Yingtao DingSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, 100081, Beijing, China.

Hengzhang YangSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, 100081, Beijing, China.

Qiangqiang LiuSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, 100081, Beijing, China.

Teng PanSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, 100081, Beijing, China.

Ziyue ZhangSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, 100081, Beijing, China.ORCID http://orcid.org/0000-0002-9218-7233

Huikai XieSchool of Integrated Circuits and Electronics, Beijing Institute of Technology, 100081, Beijing, China. hk.xie@ieee.org.

Funding

National Natural Science Foundation of China (National Science Foundation of China) 62074015

6 · The paper itself

Abstract

A tip-tilt-piston 3 × 3 electrothermal micromirror array (MMA) integrated with temperature field-based position sensors is designed and fabricated in this work. The size of the individual octagonal mirror plates is as large as 1.6 mm × 1.6 mm. Thermal isolation structures are embedded to reduce the thermal coupling among the micromirror units. Results show that each micromirror unit has a piston scan range of 218 μm and a tip-tilt optical scan angle of 21° at only 5 V

Identifiers

PMID40055315

DOI10.1038/s41378-024-00835-w

PMCPMC11889227

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LicenceCC BY

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.