Evidence map›Paper›PMID 40047588›Full record

ArticleMicromachines2025

Capacitance-Voltage Studies on Electrostatically Actuated MEMS Micromirror Arrays.

Jiahao Chen, Xiaohui Yang, Mustaqim Siddi Que Iskhandar, Md Kamrul Hasan, Shilby Baby, Muhammad Hasnain Qasim, Dennis Löber, Shujie Liu, Roland Donatiello, Steffen Liebermann and 2 more

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

12 authors.

Jiahao ChenInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany.
Xiaohui YangInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany.ORCID 0000-0003-4524-3674
Mustaqim Siddi Que IskhandarNanoscale Glasstec GmbH, Heinrich-Plett-Straße 40, 34132 Kassel, Germany.
Md Kamrul HasanInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany.
Shilby BabyNanoscale Glasstec GmbH, Heinrich-Plett-Straße 40, 34132 Kassel, Germany.
Muhammad Hasnain QasimInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany.
Dennis LöberInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany.
Shujie LiuInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany.
Roland DonatielloInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany.ORCID 0009-0002-1997-1205
Steffen LiebermannNanoscale Glasstec GmbH, Heinrich-Plett-Straße 40, 34132 Kassel, Germany.
Guilin XuNanoscale Glasstec GmbH, Heinrich-Plett-Straße 40, 34132 Kassel, Germany.
Hartmut HillmerInstitute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany.ORCID 0000-0001-8228-5895

Funding

BMBF Sunniness, Germany 13N15740, 13N15741DBU, Germany AZ35501_33
6 · The paper itself

Abstract

This article presents the electrostatic actuation performance of micromirror arrays for intelligent active daylight control and energy management in green buildings using a capacitive-voltage (C-V) measurement technique. In order to understand how geometric hinge parameters, initial opening angles, and materials affect the overall efficiency and functionality of the system, micromirror arrays have been analyzed using C-V measurements considering (i) full and broken hinge structures, (ii) 90° and 130° initial tilt angles (Φ), and (iii) different material layer combinations. The measurement results indicate that both an increase in the Young's modulus of the applied materials and increasing the initial tilt angles increase the threshold voltages during the closing process of the micromirrors.

Indexed as

capacitance–voltage (C-V) measurementelectrostatic actuationhinge structureinitial tilt angleMEMS micromirror arrayspull-in voltage

Identifiers

PMID40047588
PMCPMC11857267

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.