ArticleLight, science & applications2025
Controlling the wavefront aberration of a large-aperture and high-precision holographic diffraction grating.
Article in Light, science & applications, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 11 papers.
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Who cites it
11 citing papers in PubMed.
- Reconstruction of Misalignment Aberrations for Cylindrical Surfaces with Complex Parameters in Pseudo Lateral Shearing Interferometry.Sensors (Basel, Switzerland) · 2026Article
- Phase-multiplied interferometry via cavity dynamics for resolution-enhanced coherent ranging.Light, science & applications · 2026Article
- Ultra-precision control of dual-axis scanning mechanism based on PSO-RBF neural network.Scientific reports · 2025Article
- A Comprehensive Review of Optical Metrology and Perception Technologies.Sensors (Basel, Switzerland) · 2025Review
- Precision Nanometrology: Laser Interferometer, Grating Interferometer and Time Grating Sensor.Sensors (Basel, Switzerland) · 2025Review
- A Review: Grating Encoder Technologies for Multi-Degree-of-Freedom Spatial Measurement.Sensors (Basel, Switzerland) · 2025Review
- A Review: Absolute Linear Encoder Measurement Technology.Sensors (Basel, Switzerland) · 2025Review
- Interference Field Control for High-Uniformity Nanopatterning: A Review.Sensors (Basel, Switzerland) · 2025Review
- Research on the Multi-Degree-of-Freedom Programmable Lighting Method.Sensors (Basel, Switzerland) · 2025Article
- Cross-scale structures fabrication via hybrid lithography for nanolevel positioning.Microsystems & nanoengineering · 2025Article
- Technologies for Fabricating Large-Size Diffraction Gratings.Sensors (Basel, Switzerland) · 2025Review
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Authors and funding
12 authors.
Funding
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Abstract
The scanning interference field exposure technique is an effective method to fabricate holographic diffraction grating with meter-level size and nano-level precision. The main problems of fabricating large-aperture and high-precision grating by this technique are the high-precision displacement measurement of the stage, the high-precision control of the interference fringe and the real time compensation of the grating phase error. In this paper, the influence of grating groove error on the wavefront aberration is analyzed. In order to improve the precision of the stage with displacement range more than one meter, an integrated displacement measurement combining grating sensing and laser interferometry is proposed, which suppresses the influence of environment on measurement precision under long displacement range. An interference fringe measurement method is proposed, which combines the diffraction characteristics of the measuring grating with the phase-shifting algorithm. By controlling the direction, period and phase nonlinear errors of the interference fringe, high quality interference fringe can be obtained. Further, a dynamic phase-locking model is established by using heterodyne interferometry to compensate grating phase error caused by stage motion error in real time. A grating with the aperture of 1500 mm × 420 mm is fabricated. The wavefront aberration reaches 0.327λ @ 632.8 nm and the wavefront gradient reaches 16.444 nm/cm. This research presents a novel technique for the fabrication of meter-level size and nano-level precision holographic grating, which would further promote the development of chirped pulse amplification systems, high-energy laser and ultra-high precision displacement measurement.
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