Evidence map›Paper›PMID 39975633›Full record

ArticleNanophotonics (Berlin, Germany)2025

Neural network-based analysis algorithm on Mueller matrix data of spectroscopic ellipsometry for the structure evaluation of nanogratings with various optical constants.

Juwon Jung, Nagyeong Kim, Kibaek Kim, Jongkyoon Park, Yong Jai Cho, Won Chegal, Young-Joo Kim

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Nanophotonics (Berlin, Germany), 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.

0numbers the graph read from it
0cells of the map it votes in
2citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

2 citing papers in PubMed.

  1. Article
  2. Review
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

7 authors.

Juwon JungDepartment of Mechanical Engineering, Yonsei University, Seoul, Republic of Korea.
Nagyeong KimDepartment of Mechanical Engineering, Yonsei University, Seoul, Republic of Korea.
Kibaek KimDepartment of Mechanical Engineering, Yonsei University, Seoul, Republic of Korea.
Jongkyoon ParkSemiconductor and Display Metrology Group, Strategic Technology Research Institute, Korea Research Institute of Standards and Science, Daejeon, Republic of Korea.
Yong Jai ChoSemiconductor and Display Metrology Group, Strategic Technology Research Institute, Korea Research Institute of Standards and Science, Daejeon, Republic of Korea.
Won ChegalSemiconductor and Display Metrology Group, Korea Research Institute of Standards and Science, 267 Gajeongno, Yuseong-Gu, Daejeon, 34113, Republic of Korea.ORCID https://orcid.org/0000-0001-8774-8318
Young-Joo KimDepartment of Mechanical Engineering, Yonsei University, Seoul, Republic of Korea.ORCID https://orcid.org/0000-0002-5378-422X

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Accurate and fast characterization of nanostructures using spectroscopic ellipsometry (SE) is required in both industrial and research fields. However, conventional methods used in SE data analysis often face challenges in balancing accuracy and speed, especially for the

Indexed as

nanostructureneural networkoptical constantspectroscopic ellipsometry

Identifiers

PMID39975633
PMCPMC11834052

What OpenQuestion holds

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.