Evidence map›Paper›PMID 39953087›Full record

ArticleScientific reports2025

Impact of electron cyclotron wave resonance plasma on defect reduction in ZnO thin films.

Kota Hibino, Jiří Olejníček, Kohei Yamanoi, Carlito S Ponseca, Ali Shuaib, Yuki Maruyama, Aneta Písaříková, Michal Kohout, Martin Čada, Anna Kapran and 5 more

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Scientific reports, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

15 authors.

Kota HibinoDepartment of Physical Science and Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya, 466-8555, Japan.
Jiří OlejníčekInstitute of Physics of the Czech Academy of Sciences, Na Slovance 2, Prague 8, 182 00, Czech Republic. olejn@fzu.cz.
Kohei YamanoiInstitute of Laser Engineering, Osaka University, 2-6 Yamadaoka, Suita, 565- 0871, Osaka, Japan.
Carlito S PonsecaDepartment of Mathematics and Natural Sciences, Gulf University for Science and Technology, Hawally, Kuwait. ponseca.c@gust.edu.kw.
Ali ShuaibBiomedical Engineering Unit, Department of Physiology, Faculty of Medicine, Kuwait University, P. O. Box 24923, Safat, 13110, Kuwait.
Yuki MaruyamaDepartment of Physical Science and Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya, 466-8555, Japan.
Aneta PísaříkováInstitute of Physics of the Czech Academy of Sciences, Na Slovance 2, Prague 8, 182 00, Czech Republic.
Michal KohoutInstitute of Physics of the Czech Academy of Sciences, Na Slovance 2, Prague 8, 182 00, Czech Republic.
Martin ČadaInstitute of Physics of the Czech Academy of Sciences, Na Slovance 2, Prague 8, 182 00, Czech Republic.
Anna KapranInstitute of Physics of the Czech Academy of Sciences, Na Slovance 2, Prague 8, 182 00, Czech Republic.
Yugo AkabeInstitute of Laser Engineering, Osaka University, 2-6 Yamadaoka, Suita, 565- 0871, Osaka, Japan.
Nobuhiko SarukuraInstitute of Laser Engineering, Osaka University, 2-6 Yamadaoka, Suita, 565- 0871, Osaka, Japan.
Zdeněk HubičkaInstitute of Physics of the Czech Academy of Sciences, Na Slovance 2, Prague 8, 182 00, Czech Republic.
Shingo OnoDepartment of Physical Science and Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya, 466-8555, Japan. ono.shingo@nitech.ac.jp.
Marilou Cadatal-RadubanInstitute of Laser Engineering, Osaka University, 2-6 Yamadaoka, Suita, 565- 0871, Osaka, Japan.

Funding

Amada Foundation Grant No. AF-2022230-B3Czech Academy of Sciences MPP project no. JSPS-23-07European Structural and Investment Funds and the Czech Ministry of Education, Youth and Sports Project No. SENDISO -CZ.02.01.01/00/22_008/0004596Japan Society for the Promotion of Science Grant Number 21K18909Kuwait Foundation for the Advancement of Sciences PN2335EE1857New Zealand Ministry of Business, Innovation, and Employment CSG-MAU2003Osaka University Institute of Laser Engineering Collaborative Research Fund 2024B1-004
6 · The paper itself

Abstract

This study presents the fabrication of highly photosensitive undoped zinc oxide (ZnO) thin films for vacuum ultraviolet (VUV) radiation detection, covering the wavelength range of 100-200 nm. ZnO films were deposited using hybrid pulsed reactive magnetron sputtering, assisted by ECWR (electron cyclotron wave resonance) plasma. Control of the ECWR power (P

Indexed as

Electron cyclotron wave resonanceMedium-frequency range magnetron sputteringPhotoconductive detectorThin filmVacuum ultravioletZinc oxide

Identifiers

PMID39953087
PMCPMC11829018

What OpenQuestion holds

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LicenceCC BY-NC-ND
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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.