Evidence map›Paper›PMID 39913873›Full record

ArticleACS applied materials & interfaces2025

Ultralow-Resistance Contacts to Heavily Doped p-Type Nb

Ruixue Li, Jeff J P M Schulpen, Rebecca A Dawley, Nitzan Hirshberg, Michael L Odlyzko, Seungjun Lee, Khondker Shihabul Hoque, Tony Low, Alexander S McLeod, Ageeth A Bol and 1 more

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in ACS applied materials & interfaces, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

11 authors.

Ruixue LiDepartment of Electrical and Computer Engineering, University of Minnesota-Twin Cities, Minneapolis, Minnesota 55455, United States.ORCID 0009-0007-7703-8495
Jeff J P M SchulpenDepartment of Applied Physics and Science Education, Eindhoven University of Technology, Eindhoven 5600 MB, The Netherlands.ORCID 0000-0003-4871-0813
Rebecca A DawleyDepartment of Chemistry, University of Michigan, Ann Arbor, Michigan 48109, United States.ORCID 0009-0005-4284-5161
Nitzan HirshbergSchool of Physics and Astronomy, University of Minnesota, Twin Cities, Minneapolis, Minnesota 55455, United States.
Michael L OdlyzkoUniversity of Minnesota Characterization Facility, Minneapolis, Minnesota 55455, United States.
Seungjun LeeDepartment of Electrical and Computer Engineering, University of Minnesota-Twin Cities, Minneapolis, Minnesota 55455, United States.ORCID 0000-0001-8197-1287
Khondker Shihabul HoqueDepartment of Electrical and Computer Engineering, University of Minnesota-Twin Cities, Minneapolis, Minnesota 55455, United States.ORCID 0000-0002-0302-0563
Tony LowDepartment of Electrical and Computer Engineering, University of Minnesota-Twin Cities, Minneapolis, Minnesota 55455, United States.ORCID 0000-0002-5759-5899
Alexander S McLeodSchool of Physics and Astronomy, University of Minnesota, Twin Cities, Minneapolis, Minnesota 55455, United States.
Ageeth A BolDepartment of Chemistry, University of Michigan, Ann Arbor, Michigan 48109, United States.ORCID 0000-0002-1259-6265
Steven J KoesterDepartment of Electrical and Computer Engineering, University of Minnesota-Twin Cities, Minneapolis, Minnesota 55455, United States.ORCID 0000-0001-6104-1218

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Transition metal dichalcogenides (TMDs) are an important class of materials for future microelectronics. Of particular interest are TMDs deposited by atomic layer deposition (ALD) since this technique allows both back-end-of-line (BEOL) compatible deposition and the ability to create heavily doped regions for contact formation. In this work, we characterize ∼3 nm-thick heavily doped Nb

Indexed as

atomic layer depositioncontact resistancedopingKelvin probe force microscopyMOSFETtransition metal dichalcogenideWSe2

Identifiers

PMID39913873
PMCPMC11843536

What OpenQuestion holds

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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.