Evidence map›Paper›PMID 39879353›Full record

ArticleNano letters2025

Deep-Ultraviolet AlN Metalens with Imaging and Ultrafast Laser Microfabrication Applications.

Yu Chieh Peng, Yu Jie Wang, Kuan-Heng Chen, Yu Hung Lin, Haruyuki Sakurai, Hsueh-Chih Chang, Cheng-Ching Chiang, Ruei-Tzu Duh, Bo-Ray Lee, Chia-Yen Huang and 4 more

Abstract read
In one paragraph

Article in Nano letters, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 9 papers.

0numbers the graph read from it
0cells of the map it votes in
9citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

9 citing papers in PubMed.

  1. High Numerical Aperture Metalens for the Deep Ultraviolet.Advanced materials (Deerfield Beach, Fla.) · 2026
    Article
  2. Article
  3. Recent Developments in Deep-Ultraviolet Flat Optics.Nanophotonics (Berlin, Germany) · 2026
    Review
  4. Article
  5. Review
  6. Review
  7. Water-Immersed GaP Huygens' Meta-Optics for Visible Structured Light Generation.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025
    Article
  8. Article
  9. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

14 authors.

Yu Chieh PengInstitute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.
Yu Jie WangInstitute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.
Kuan-Heng ChenInstitute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.
Yu Hung LinInstitute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.
Haruyuki SakuraiInstitute for Photon Science and Technology, The University of Tokyo, Tokyo 113-0033, Japan.
Hsueh-Chih ChangInstitute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.
Cheng-Ching ChiangInstitute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.
Ruei-Tzu DuhInstitute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.
Bo-Ray LeeInstitute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.
Chia-Yen HuangDepartment of Photonics, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan.ORCID 0000-0003-0844-1903
Min-Hsiung ShihResearch Center for Applied Sciences, Academia Sinica, Taipei 11529, Taiwan.ORCID 0000-0002-5627-7098
Ray-Hua HorngInstitute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.ORCID 0000-0002-1160-6775
Kuniaki KonishiInstitute for Photon Science and Technology, The University of Tokyo, Tokyo 113-0033, Japan.ORCID 0000-0003-2389-9787
Ming Lun TsengInstitute of Electronics, National Yang Ming Chiao Tung University, Hsinchu, 30010, Taiwan.ORCID 0000-0003-0418-8162

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Deep-ultraviolet (DUV) light is essential for applications including fabrication, molecular research, and biomedical imaging. Compact metalenses have the potential to drive further innovation in these fields, provided they utilize a material platform that is cost-effective, durable, and scalable. In this work, we present aluminum nitride (AlN) metalenses as an efficient solution for DUV applications. These metalenses, with a thickness of only 380 nm, deliver DUV focusing and imaging capabilities close to the theoretical diffraction limit. Leveraging their robustness to intense ultrafast laser irradiation, we demonstrate successful DUV ultrafast laser direct writing of microstructures on a polymer film and silicon substrate. These results underscore the significant promise of advancing photonic technologies in this critical wavelength regime.

Indexed as

deep ultraviolet lightDUV imaginglaser direct writingmetalensmetasurface

Identifiers

PMID39879353
PMCPMC11869270

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.