ArticleMicromachines2025
Nano-Perforated Silicon Membrane with Monolithically Integrated Buried Cavity.
Sanjeev Vishal Kota et al.PubMed ↗Full text ↗Publisher ↗
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ArticleMicromachines2025
Sanjeev Vishal Kota et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.