Simulation and Experimental Study of the Single-Pulse Femtosecond Laser Ablation Morphology of GaN Films.

Mingyuan Wang, Tong Zhang, Yanping Yuan, Zhiyong Wang, Yanlei Liu, Lin Chen

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In one paragraph

Article in Micromachines, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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5 · Who and what money

Authors and funding

6 authors.

Mingyuan WangSchool of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing 100124, China.

Tong ZhangSchool of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing 100124, China.ORCID 0000-0003-0444-308X

Yanping YuanSchool of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing 100124, China.

Zhiyong WangSchool of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing 100124, China.

Yanlei LiuHenan Key Laboratory of Infrared Spectrum Measures, Applications College of Physics, Henan Normal University, Xinxiang 453007, China.

Lin ChenSchool of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing 100124, China.

Funding

National Nature Science Foundation of China 52105423R&D Program of Beijing Municipal Education Commission KM202210005004

6 · The paper itself

Abstract

Gallium nitride (GaN) exhibits distinctive physical and chemical properties that render it indispensable in a multitude of electronic and optoelectronic devices. Given that GaN is a typical hard and brittle material that is difficult to machine, femtosecond laser technology provides an effective and convenient tool for processing such materials. However, GaN undergoes complex physical and chemical changes during high-power ablation, which poses a challenge to high-precision processing with controllable geometry. In this study, the quantitative relationship between the parameters of a single-pulse femtosecond laser and GaN ablation morphology was investigated using isotherm distribution. A multiphysics model using COMSOL Multiphysics

Indexed as

ablation morphologyfemtosecond laserGaN filmmultiphysics model

Identifiers

PMID39858740

DOI10.3390/mi16010085

PMCPMC11767518

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.