ReviewMicromachines2024
A Review of Optical Interferometry for High-Precision Length Measurement.
Review in Micromachines, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 13 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
13 citing papers in PubMed.
- A Nonlinear Error Compensation Method for Heterodyne Interferometry Based on Self-Supervised Physics-Informed Neural Networks with Frequency-Domain Priors.Sensors (Basel, Switzerland) · 2026Article
- Multi-Soliton Microcombs Enable Ultrafast Nanometric-Precision Ranging and Photon-Level Detection.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2026Article
- Malus's law-enhanced Michelson interferometer with PSO-based calibration and data-driven error compensation for medical micro-displacement measurement.Frontiers in artificial intelligence · 2026Article
- Research on an Improved YOLOv8 Detection Method for Surface Defects of Optical Components.Micromachines · 2025Article
- A Comprehensive Review of Optical Metrology and Perception Technologies.Sensors (Basel, Switzerland) · 2025Review
- Precision Nanometrology: Laser Interferometer, Grating Interferometer and Time Grating Sensor.Sensors (Basel, Switzerland) · 2025Review
- A Review of Optical Metrology Techniques for Advanced Manufacturing Applications.Micromachines · 2025Review
- A Review: Grating Encoder Technologies for Multi-Degree-of-Freedom Spatial Measurement.Sensors (Basel, Switzerland) · 2025Review
- A Review: Absolute Linear Encoder Measurement Technology.Sensors (Basel, Switzerland) · 2025Review
- Interference Field Control for High-Uniformity Nanopatterning: A Review.Sensors (Basel, Switzerland) · 2025Review
- A Review on Recent Advances in Signal Processing in Interferometry.Sensors (Basel, Switzerland) · 2025Review
- Performing MHz-Level Repetition Rate Tuning for Coherent Dual-Microcomb Interferometry.Micromachines · 2025Article
- Technologies for Fabricating Large-Size Diffraction Gratings.Sensors (Basel, Switzerland) · 2025Review
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
7 authors.
Funding
Abstract
Optical interferometry has emerged as a cornerstone technology for high-precision length measurement, offering unparalleled accuracy in various scientific and industrial applications. This review provides a comprehensive overview of the latest advancements in optical interferometry, with a focus on grating and laser interferometries. For grating interferometry, systems configurations ranging from single-degree- to multi-degree-of-freedom are introduced. For laser interferometry, different measurement methods are presented and compared according to their respective characteristics, including homodyne, heterodyne, white light interferometry, etc. With the rise of the optical frequency comb, its unique spectral properties have greatly expanded the length measurement capabilities of laser interferometry, achieving an unprecedented leap in both measurement range and accuracy. With regard to discussion on enhancement of measurement precision, special attention is given to periodic nonlinear errors and phase demodulation methods. This review offers insights into current challenges and potential future directions for improving interferometric measurement systems, and also emphasizes the role of innovative technologies in advancing precision metrology technology.
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What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.