ArticleScience advances2025
Nanophotonic inspection of deep-subwavelength integrated optoelectronic chips.
Article in Science advances, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
1 citing paper in PubMed.
- Super-resolution imaging of resonance modes in semiconductor nanowires by detecting photothermal nonlinear scattering.Nanophotonics (Berlin, Germany) · 2025Article
Corrections and comments
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Authors and funding
10 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Artificial nanostructures with ultrafine and deep-subwavelength features have emerged as a paradigm-shifting platform to advanced light-field management, becoming key building blocks for high-performance integrated optoelectronics and flat optics. However, direct optical inspection of integrated chips remains a missing metrology gap that hinders quick feedback between design and fabrications. Here, we demonstrate that photothermal nonlinear scattering microscopy can be used for direct imaging and resolving of integrated optoelectronic chips beyond the diffraction limit. We reveal that the inherent coupling among deep-subwavelength nanostructures supporting leaky resonances allows for the pronounced heating effect to access reversible nonlinear modulations of the confocal reflection intensity, yielding optical resolving power down to 80 nm (~λ/7). The versatility of this approach has been exemplified by imaging silicon grating couplers and metalens with minimum critical dimensions of 100 nm, as well as central processing unit chip with 45-nm technology, unfolding the long-sought possibility of in situ, nondestructive, high-throughput optical inspection of integrated optoelectronic and nanophotonic chips.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.