Finite element-based nonlinear dynamic optimization of nanomechanical resonators.

Zichao Li, Farbod Alijani, Ali Sarafraz, Minxing Xu, Richard A Norte, Alejandro M Aragón, Peter G Steeneken

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Article in Microsystems & nanoengineering, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

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1citing papers in PubMed

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1 · What the graph read from it

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1 citing paper in PubMed.

Experimentally characterising the dynamical landscape of an active MEMS cantilever.Communications engineering · 2025
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5 · Who and what money

Authors and funding

7 authors.

Zichao LiFaculty of Mechanical Engineering, Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands. z.Li-16@tudelft.nl.ORCID http://orcid.org/0000-0002-3625-7081

Farbod AlijaniFaculty of Mechanical Engineering, Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands.ORCID http://orcid.org/0000-0002-7439-8483

Ali SarafrazFaculty of Mechanical Engineering, Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands.

Minxing XuFaculty of Mechanical Engineering, Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands.

Richard A NorteFaculty of Mechanical Engineering, Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands.

Alejandro M AragónFaculty of Mechanical Engineering, Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands.

Peter G SteenekenFaculty of Mechanical Engineering, Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands. p.g.steeneken@tudelft.nl.ORCID http://orcid.org/0000-0002-5764-1218

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Nonlinear dynamic simulations of mechanical resonators have been facilitated by the advent of computational techniques that generate nonlinear reduced order models (ROMs) using the finite element (FE) method. However, designing devices with specific nonlinear characteristics remains inefficient since it requires manual adjustment of the design parameters and can result in suboptimal designs. Here, we integrate an FE-based nonlinear ROM technique with a derivative-free optimization algorithm to enable the design of nonlinear mechanical resonators. The resulting methodology is used to optimize the support design of high-stress nanomechanical Si

Identifiers

PMID39833156

DOI10.1038/s41378-024-00854-7

PMCPMC11746933

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