ArticleRSC advances2025
Fluorescent nanodiamond scintillators for beam diagnostics of EUV and soft X-ray in photolithographic applications.
Article in RSC advances, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
1 citing paper in PubMed.
- Nitrogen-Vacancy Centers in Fluorescent Nanodiamonds: Emerging Applications from Healthcare Diagnostics to Semiconductor Metrology.Accounts of chemical research · 2026Article
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Authors and funding
7 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Extreme ultraviolet (EUV) lithography is a cutting-edge technology in contemporary semiconductor chip manufacturing. Monitoring the EUV beam profiles is critical to ensuring consistent quality and precision in the manufacturing process. This study uncovers the practical use of fluorescent nanodiamonds (FNDs) coated on optical image sensors for profiling EUV and soft X-ray (SXR) radiation beams. We employed a positive electrospray ion source to deposit 100 nm FNDs onto indium tin oxide (ITO)-coated substrates, forming 1 μm thick films. The scintillation films exhibited approximately 50% transparency in the visible region and could emit red fluorescence from neutral nitrogen-vacancy (NV
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Registered trials
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