ArticleMicrosystems & nanoengineering2025
Tunable MEMS-based meta-absorbers for nondispersive infrared gas sensing applications.
Article in Microsystems & nanoengineering, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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Who cites it
2 citing papers in PubMed.
- Selective laser-induced etching process-enabled double-cavity glass MEMS hydrogen sensor at room-temperature sensitivity.Microsystems & nanoengineering · 2026Article
- Flatland Metasurfaces for Optical Gas Sensing.Sensors (Basel, Switzerland) · 2026Review
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Authors and funding
4 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
In conventional nondispersive infrared (NDIR) gas sensors, a wide-spectrum IR source or detector must be combined with a narrowband filter to eliminate the interference of nontarget gases. Therefore, the multiplexed NDIR gas sensor requires multiple pairs of narrowband filters, which is not conducive to miniaturization and integration. Although plasmonic metamaterials or multilayer thin-film structures are widely applied in spectral absorption filters, realizing high-performance, large-area, multiband, and compact filters is rather challenging. In this study, we propose and demonstrate a narrowband meta-absorber based on a planar metal-insulator-metal (MIM) cavity with a metallic ultrathin film atop. Nearly perfect absorption of different wavelengths can be obtained by controlling the thickness of the dielectric spacer. More significantly, the proposed meta-absorber exhibits angle-dependent characteristics. The absorption spectra of different gases can be matched by changing the incident angle of the light source. We also preliminarily investigate the CO
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