ArticleMicromachines2024
Design and Implementation of a CMOS-MEMS Out-of-Plane Detection Gyroscope.
Article in Micromachines, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
1 citing paper in PubMed.
- Review of Research Advances in Gyroscopes' Structural Forms and Processing Technologies Viewed from Performance Indices.Sensors (Basel, Switzerland) · 2025Review
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PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
5 authors.
Funding
Abstract
A MEMS gyroscope is a critical sensor in attitude control platforms and inertial navigation systems, which has the advantages of small size, light weight, low energy consumption, high reliability and strong anti-interference capability. This paper presents the design, simulation and fabrication of a Y-axis gyroscope with out-of-plane detection developed using CMOS-MEMS technology. The structural dimensions of the gyroscope were optimized through a multi-objective genetic algorithm, and modal, harmonic response and range simulation analyses were carried out to verify the reasonableness of the design. The chip measured 1.2 mm × 1.3 mm. The simulation results indicate that the driving and detecting frequencies of the gyroscope were 9215.5 Hz and 9243.5 Hz, respectively; the Q-factors were 83,790 and 46,085; the mechanical sensitivity was 4.87 × 10
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Registered trials
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