Novel Deposition Technique for Fabricating Films with Customized Thickness Profiles.

Chi-Yung Hsieh, Yu-Chi Lin, Xuan-Shan Huang, Jing-Ting Lin, Cheng-Sheng Huang

Abstract read

In one paragraph

Article in Micromachines, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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0citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

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3 · Its place in the literature

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0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

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PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

5 authors.

Chi-Yung HsiehDepartment of Mechanical Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan.

Yu-Chi LinDepartment of Mechanical Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan.

Xuan-Shan HuangDepartment of Mechanical Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan.

Jing-Ting LinDepartment of Mechanical Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan.

Cheng-Sheng HuangDepartment of Mechanical Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan.

Funding

National Health Research Institutes NHRI-EX110-10921EI, NHRI-EX111-10921EI

6 · The paper itself

Abstract

This study introduces a novel deposition technique capable of depositing thin films with any arbitrary thickness profile. The apparatus consists of a fixed shadow mask and a rotating sample carrier plate. The shadow mask features a specifically designed opening curve that corresponds to the particular thickness profile of the deposited film. We successfully designed two shadow masks and used them to deposit films with linear thickness gradients of 49.3 and 86.8 Å/mm and films with sinusoidal thickness profiles with a period of 40 mm. Furthermore, a linear variable filter was designed on the basis of a quarter-wavelength stack of Si

Indexed as

film depositiongradient thicknesslinear variable filtershadow mask

Identifiers

PMID39770166

DOI10.3390/mi15121412

PMCPMC11678676

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.