ArticleNature communications2025
Silicon photonic MEMS switches based on split waveguide crossings.
Article in Nature communications, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.
What it found
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Who cites it
4 citing papers in PubMed.
- Mechano-optically co-designed highly-scalable silicon photonic MEMS switches with quasi-buckling-free 2 × 2 horizontal adiabatic directional couplers.Microsystems & nanoengineering · 2026Article
- Decoupled Characterization of Electro-opto-mechanical Transduction - Leveraging Pull-in Hysteresis in NEMS Photonic Modulators.Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems · 2026Article
- Nonvolatile silicon photonic MEMS switches enabled by van der Waals force.Science advances · 2025Article
- Towards large-scale programmable silicon photonic chip for signal processing.Nanophotonics (Berlin, Germany) · 2024Review
Corrections and comments
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Authors and funding
7 authors.
Funding
Abstract
The continuous push for high-performance photonic switches is one of the most crucial premises for the sustainable scaling of programmable and reconfigurable photonic circuits for a wide spectrum of applications. Conventional optical switches rely on the perturbative mechanisms of mode coupling or mode interference, resulting in inherent bottlenecks in their switching performance concerning size, power consumption and bandwidth. Here we propose and realize a silicon photonic 2×2 elementary switch based on a split waveguide crossing (SWX) consisting of two halves. The propagation direction of the incident light is manipulated to implement the OFF/ON states by splitting/combining the two halves of the SWX, showing excellent performance with low excess loss and low crosstalk over an ultrawide bandwidth. Both elementary switch and a 64×64 switch array based on Benes topology are fabricated and characterized, demonstrating great potential for practical scenarios such as photonic interconnect/routing, Lidar and spectroscopy, photonic computing, as well as microwave photonics.
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Registered trials
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