ArticleNano letters2025
12-Spin-Qubit Arrays Fabricated on a 300 mm Semiconductor Manufacturing Line.
Article in Nano letters, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 11 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
11 citing papers in PubMed.
- Impact of the local valley splitting on the coherence of conveyor-belt spin shuttling inNature communications · 2026Article
- Highly Tunable Two-Qubit Interactions in Si/SiGe Quantum Dots by Interchanging the Roles of Qubit-Defining Gates.Nano letters · 2026Article
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- Article
- A tri-linear quantum dot architecture for semiconductor spin qubits.Scientific reports · 2026Article
- Valley splitting correlations across a silicon quantum well containing germanium.Nature communications · 2025Article
- An 11-qubit atom processor in silicon.Nature · 2025Article
- Robust and localised control of a 10-spin qubit array in germanium.Nature communications · 2025Article
- Operating two exchange-only qubits in parallel.Nature · 2025Article
- Engineering Ge Profiles in Si/SiGe Heterostructures for Increased Valley Splitting.Nano letters · 2025Article
- Baseband control of single-electron silicon spin qubits in two dimensions.Nature communications · 2025Article
Corrections and comments
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Authors and funding
32 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Intel's efforts to build a practical quantum computer are focused on developing a scalable spin-qubit platform leveraging industrial high-volume semiconductor manufacturing expertise and 300 mm fabrication infrastructure. Here, we provide an overview of the design, fabrication, and demonstration of a new customized quantum test chip, which contains 12-quantum-dot spin-qubit linear arrays, code named Tunnel Falls. These devices are fabricated using immersion and extreme ultraviolet lithography (EUV), along with other standard high-volume manufacturing (HVM) processes as well as production-level process control. We present key device features and fabrication details as well as qubit characterization results confirming device functionality. These results corroborate our fabrication methods and are a crucial step toward scaling of extensible 2D qubit array schemes.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.