ArticleRSC advances2024
Thermogravimetric analysis of commercial tungsten molecular precursors for vapor phase deposition processes.
Article in RSC advances, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
1 citing paper in PubMed.
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
7 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Thin films and coatings based on Group 6 metal tungsten (W) have garnered intense interest for applications including catalysis, lubrication, and solar energy. Due to its selectivity and conformality, atomic layer deposition (ALD) has emerged as a key route towards oxides, dichalcogenides, and elemental metal films of W. A key component of the ALD process is the appropriate selection of molecular precursors. Thermogravimetric analysis (TGA) is the primary sorting criterion for precursor suitability and helps delineate probable ALD temperature windows, sublimation/vaporization kinetics, and parameters of decomposition. Currently, a majority of the W materials growth literature is traced to a grouping of commercially available volatile molecular precursors. However, no comprehensive thermochemical analysis exists for all of these precursors, hampering a meaningful direct comparison. Herein, we present an extensive thermogravimetric analysis and direct comparison of commercial volatile W molecular precursors. We report probable ALD temperature windows, enthalpies of sublimation (Δ
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.