Design, Fabrication and Characterization of Disk Resonator Gyroscope with Vibration and Shock Resistance.

Zhaoyang Zhai, Xiaorui Bie, Bingchen Zhu, Zhenxiang Qi, Bowen Wang, Kunfeng Wang, Xudong Zou

Abstract read

In one paragraph

Article in Sensors (Basel, Switzerland), 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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1 · What the graph read from it

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Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

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4 · The record

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5 · Who and what money

Authors and funding

7 authors.

Zhaoyang ZhaiThe State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.

Xiaorui BieThe State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.

Bingchen ZhuThe State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.

Zhenxiang QiThe State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.

Bowen WangThe State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.ORCID 0009-0009-9626-3844

Kunfeng WangThe State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.

Xudong ZouThe State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.ORCID 0000-0002-5347-0124

Funding

The National Key Research and Development Program of China 2022YFB3207301

6 · The paper itself

Abstract

This paper presents a comprehensive optimization of an outer frame anchor disk resonator gyroscope (DRG) with enhanced resistance to vibration and shock, achieved by increasing the resonant frequency of the tub and translation modes. Furthermore, the wineglass mode retains a high quality factor, enhancing sensitivity and reducing the angle random walk (ARW). The performance of the proposed DRG is analyzed using dynamic equations, and its structural parameters are optimized through finite element analysis (FEA). The prototype device was fabricated using a two-mask silicon-on-insulator (SOI) process on (100) single-crystal silicon (SCS), which is better suited for complementary metal-oxide-semiconductor (CMOS) integration compared to (111) SCS. Experimental results show an ARW of 0.63°/h and a bias instability (BI) of 7.7°/h, with no significant performance degradation observed under vibrational environments, indicating potential for tactical-grade performance.

Indexed as

disk resonator gyroscopequality factorstructure design

Identifiers

PMID39686090

DOI10.3390/s24237553

PMCPMC11644445

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