Evidence map›Paper›PMID 39683864›Full record

ReviewMolecules (Basel, Switzerland)2024

Silver CVD and ALD Precursors: Synthesis, Properties, and Application in Deposition Processes.

Evgeniia S Vikulova, Svetlana I Dorovskikh, Tamara V Basova, Aleksander A Zheravin, Natalya B Morozova

Abstract readReview
In one paragraph

Review in Molecules (Basel, Switzerland), 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.

0numbers the graph read from it
0cells of the map it votes in
3citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

3 citing papers in PubMed.

  1. Review
  2. Review
  3. Review
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

5 authors.

Evgeniia S VikulovaNikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Ac. Lavrentiev Ave. 3, 630090 Novosibirsk, Russia.
Svetlana I DorovskikhNikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Ac. Lavrentiev Ave. 3, 630090 Novosibirsk, Russia.
Tamara V BasovaNikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Ac. Lavrentiev Ave. 3, 630090 Novosibirsk, Russia.ORCID 0000-0003-4001-8371
Aleksander A ZheravinMeshalkin National Medical Research Center, Ministry of Public Health of the Russian Federation, Rechkunovskaya Str. 15, 630055 Novosibirsk, Russia.
Natalya B MorozovaNikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Ac. Lavrentiev Ave. 3, 630090 Novosibirsk, Russia.

Funding

Russian Science Foundation 20-15-00222-P
6 · The paper itself

Abstract

This review summarized the developments in the field of volatile silver complexes, which can serve as precursors in gas-transport reactions for the production of thin films and metal nanoparticles via chemical vapor deposition (CVD) and atomic layer deposition (ALD). Silver-based films and nanoparticles are widely used in various high-tech fields, including medicine. For effective use in CVD and ALD processes, the properties of silver precursors must be balanced in terms of volatility, thermal stability, and reactivity. In this review, we focus on the synthesis and comprehensive analysis of structural and thermal characteristics for the most promising classes of volatile silver complexes, as well as organometallic compounds. Following the specifics of silver chemistry, some features of the use of precursors and their selection, as well as several key directions to improving the efficiency of silver material deposition processes, are also discussed.

Indexed as

ALDCVDsilverstructurethermal propertiesvolatile precursors

Identifiers

PMID39683864
PMCPMC11643892

What OpenQuestion holds

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LicenceCC BY
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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.