Evidence map›Paper›PMID 39669097›Full record

ArticlePhotoacoustics2024

New silicon-based micro-electro-mechanical systems for photo-acoustic trace-gas detection.

Jacopo Pelini, Stefano Dello Russo, Inaki Lopez Garcia, Maria Concetta Canino, Alberto Roncaglia, Pablo Cancio Pastor, Iacopo Galli, Wei Ren, Paolo De Natale, Zhen Wang and 2 more

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Photoacoustics, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.

0numbers the graph read from it
0cells of the map it votes in
2citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

2 citing papers in PubMed.

  1. Article
  2. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

12 authors.

Jacopo PeliniUniversity "Federico II", Corso Umberto I 40, Naples, 80138, Italy.
Stefano Dello RussoCNR-INO - Istituto Nazionale di Ottica, and LENS, via N. Carrara 1, Sesto Fiorentino, 50019, Italy.
Inaki Lopez GarciaCNR-INO - Istituto Nazionale di Ottica, and LENS, via N. Carrara 1, Sesto Fiorentino, 50019, Italy.
Maria Concetta CaninoIstituto per la Microelettronica e Microsistemi (IMM) Consiglio Nazionale delle Ricerche (CNR), Via P. Gobetti 101, Bologna, 40129, Italy.
Alberto RoncagliaIstituto per la Microelettronica e Microsistemi (IMM) Consiglio Nazionale delle Ricerche (CNR), Via P. Gobetti 101, Bologna, 40129, Italy.
Pablo Cancio PastorCNR-INO - Istituto Nazionale di Ottica, and LENS, via N. Carrara 1, Sesto Fiorentino, 50019, Italy.
Iacopo GalliCNR-INO - Istituto Nazionale di Ottica, and LENS, via N. Carrara 1, Sesto Fiorentino, 50019, Italy.
Wei RenDepartment of Mechanical and Automation Engineering, The Chinese University of Hong Kong, New Territories, Hong Kong Special Administrative Region of China.
Paolo De NataleCNR-INO - Istituto Nazionale di Ottica, and LENS, via N. Carrara 1, Sesto Fiorentino, 50019, Italy.
Zhen WangDepartment of Mechanical and Automation Engineering, The Chinese University of Hong Kong, New Territories, Hong Kong Special Administrative Region of China.
Simone BorriCNR-INO - Istituto Nazionale di Ottica, and LENS, via N. Carrara 1, Sesto Fiorentino, 50019, Italy.
Mario Siciliani de CumisASI Agenzia Spaziale Italiana - Centro di Geodesia Spaziale, Località Terlecchia, Matera, 75100, Italy.

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

The achievable sensitivity level of photo-acoustic trace-gas sensors essentially depends on the performances of the acoustic transducer. In this work, the mechanical response of different silicon-based micro-electro-mechanical systems (MEMS) is characterized, aiming at investigating both their mechanical properties, namely the resonance frequency and the quality factor, and the minimum detection limit (MDL) achievable when they are exploited as an acoustic-to-voltage transducer in a trace-gas photoacoustic setup. For this purpose, a 4.56 µm Continuous-Wave (CW) quantum cascade laser (QCL) is used to excite a strong N

Indexed as

Acoustic-to-voltage transducerMicro-electro-mechanical systems (MEMS)Minimum detection limitParts-per-billion sensitivityPhoto-acoustic spectroscopyQuality factorResonant frequencyTrace-gas sensing

Identifiers

PMID39669097
PMCPMC11637086

What OpenQuestion holds

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LicenceCC BY-NC-ND
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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.