Evidence map›Paper›PMID 39635445›Full record

ArticleNanophotonics (Berlin, Germany)2024

Wafer-scale nanofabrication of sub-5 nm gaps in plasmonic metasurfaces.

Jeetendra Gour, Sebastian Beer, Pallabi Paul, Alessandro Alberucci, Michael Steinert, Adriana Szeghalmi, Thomas Siefke, Ulf Peschel, Stefan Nolte, Uwe Detlef Zeitner

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Nanophotonics (Berlin, Germany), 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.

0numbers the graph read from it
0cells of the map it votes in
2citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

2 citing papers in PubMed.

  1. Article
  2. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

10 authors.

Jeetendra GourFriedrich Schiller University Jena, Faculty of Physics and Astronomy, Abbe Center of Photonics, Institute of Applied Physics, Albert-Einstein-Str. 15, 07745 Jena, Germany.ORCID https://orcid.org/0000-0002-0098-800X
Sebastian BeerFriedrich Schiller University Jena, Faculty of Physics and Astronomy, Abbe Center of Photonics, Institute of Applied Physics, Albert-Einstein-Str. 15, 07745 Jena, Germany.ORCID https://orcid.org/0000-0001-5044-6324
Pallabi PaulFriedrich Schiller University Jena, Faculty of Physics and Astronomy, Abbe Center of Photonics, Institute of Applied Physics, Albert-Einstein-Str. 15, 07745 Jena, Germany.ORCID https://orcid.org/0000-0003-2701-3189
Alessandro AlberucciFriedrich Schiller University Jena, Faculty of Physics and Astronomy, Abbe Center of Photonics, Institute of Applied Physics, Albert-Einstein-Str. 15, 07745 Jena, Germany.ORCID https://orcid.org/0000-0001-5346-2549
Michael SteinertFriedrich Schiller University Jena, Faculty of Physics and Astronomy, Abbe Center of Photonics, Institute of Applied Physics, Albert-Einstein-Str. 15, 07745 Jena, Germany.ORCID https://orcid.org/0000-0002-5750-6673
Adriana SzeghalmiFraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Str. 7, 07745 Jena, Germany.ORCID https://orcid.org/0000-0003-2055-2825
Thomas SiefkeFriedrich Schiller University Jena, Faculty of Physics and Astronomy, Abbe Center of Photonics, Institute of Applied Physics, Albert-Einstein-Str. 15, 07745 Jena, Germany.ORCID https://orcid.org/0000-0001-6876-4080
Ulf PeschelFaculty of Physics and Astronomy, Friedrich Schiller University Jena, Institute of Solid State Theory and Optics, Max-Wien-Platz 1, 07743 Jena, Germany.ORCID https://orcid.org/0000-0002-3980-9224
Stefan NolteFriedrich Schiller University Jena, Faculty of Physics and Astronomy, Abbe Center of Photonics, Institute of Applied Physics, Albert-Einstein-Str. 15, 07745 Jena, Germany.ORCID https://orcid.org/0000-0002-2919-2662
Uwe Detlef ZeitnerFriedrich Schiller University Jena, Faculty of Physics and Astronomy, Abbe Center of Photonics, Institute of Applied Physics, Albert-Einstein-Str. 15, 07745 Jena, Germany.ORCID https://orcid.org/0000-0002-3980-6971

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

In the rapidly evolving field of plasmonic metasurfaces, achieving homogeneous, reliable, and reproducible fabrication of sub-5 nm dielectric nanogaps is a significant challenge. This article presents an advanced fabrication technology that addresses this issue, capable of realizing uniform and reliable vertical nanogap metasurfaces on a whole wafer of 100 mm diameter. By leveraging fast patterning techniques, such as variable-shaped and character projection electron beam lithography (EBL), along with atomic layer deposition (ALD) for defining a few nanometer gaps with sub-nanometer precision, we have developed a flexible nanofabrication technology to achieve gaps as narrow as 2 nm in plasmonic nanoantennas. The quality of our structures is experimentally demonstrated by the observation of resonant localized and collective modes corresponding to the lattice, with Q-factors reaching up to 165. Our technological process opens up new and exciting opportunities to fabricate macroscopic devices harnessing the strong enhancement of light-matter interaction at the single nanometer scale.

Indexed as

ALDnanogapnanogap metasurfacesnanotechnologyplasmonicssub-5 nm

Identifiers

PMID39635445
PMCPMC11501063

What OpenQuestion holds

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.