ArticleNanophotonics (Berlin, Germany)2022
100 GHz micrometer-compact broadband monolithic ITO Mach-Zehnder interferometer modulator enabling 3500 times higher packing density.
Article in Nanophotonics (Berlin, Germany), 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.
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7 citing papers in PubMed.
- GHz-rate optical phase shift in light-matter interaction-engineered, silicon-ferroelectric nematic liquid crystals.Nature communications · 2025Article
- Transparent conductive oxides as a material platform for a realization of all-optical photonic neural networks.Scientific reports · 2025Article
- Physics to system-level modeling of silicon-organic-hybrid nanophotonic devices.Scientific reports · 2024Article
- Breakthrough in Silicon Photonics Technology in Telecommunications, Biosensing, and Gas Sensing.Micromachines · 2023Review
- A large scale photonic matrix processor enabled by charge accumulation.Nanophotonics (Berlin, Germany) · 2023Article
- Self-powered broadband photodetector based on MoSNanophotonics (Berlin, Germany) · 2022Article
- Tunable nanophotonics.Nanophotonics (Berlin, Germany) · 2022Article
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8 authors.
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Abstract
Electro-optic modulators provide a key function in optical transceivers and increasingly in photonic programmable application-specific integrated circuits (ASICs) for machine learning and signal processing. However, both foundry-ready silicon-based modulators and conventional material-based devices utilizing lithium-niobate fall short in simultaneously providing high chip packaging density and fast speed. Current-driven ITO-based modulators have the potential to achieve both enabled by efficient light-matter interactions. Here, we introduce micrometer-compact Mach-Zehnder interferometer (MZI)-based modulators capable of exceeding 100 GHz switching rates. Integrating ITO-thin films atop a photonic waveguide, one can achieve an efficient
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