ArticleNanophotonics (Berlin, Germany)2022
Integrated metasurfaces on silicon photonics for emission shaping and holographic projection.
Article in Nanophotonics (Berlin, Germany), 2022. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 12 papers.
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12 citing papers in PubMed.
- High-Efficiency Generation of Vectorial Terahertz Beams via Surface-Wave-Excited Dielectric Metasurfaces.Small (Weinheim an der Bergstrasse, Germany) · 2026Article
- Voltage compensation of manufacturing errors applied to artificial band gaps in nanoscale transistor.Scientific reports · 2026Article
- Sensitivity enhancement of surface plasmon resonance biosensors based on versatile nanostructures: principle, fabrication, and illustrative applications.Microsystems & nanoengineering · 2026Review
- On-chip nonlocal metasurface for color router: conquering efficiency-loss from spatial-multiplexing.Light, science & applications · 2026Article
- A Review of Solid-State LiDAR Principles and Metasurface-Based LiDAR Sensors.Sensors (Basel, Switzerland) · 2025Review
- Inverse Design of Multi-Wavelength Achromatic Metalens Integrated On-Chip with Planar Waveguide.Nanomaterials (Basel, Switzerland) · 2025Article
- Article
- Dual-Wavelength On-Chip Integrated Metalens for Epi-Fluorescence Single-Molecule Sensing.Sensors (Basel, Switzerland) · 2024Article
- On-chip multifunctional metasurfaces with full-parametric multiplexed Jones matrix.Nature communications · 2024Article
- Article
- Dual-wavelength metalens enables Epi-fluorescence detection from single molecules.Nature communications · 2024Article
- Versatile generation and manipulation of phase-structured light beams using on-chip subwavelength holographic surface gratings.Nanophotonics (Berlin, Germany) · 2023Article
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Authors and funding
7 authors.
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Abstract
The emerging applications of silicon photonics in free space, such as LiDARs, free-space optical communications, and quantum photonics, urge versatile emission shaping beyond the capabilities of conventional grating couplers. In these applications, silicon photonic chips deliver free-space emission to detect or manipulate external objects. Light needs to emit from a silicon photonic chip to the free space with specific spatial modes, which produce focusing, collimation, orbital angular momentum, or even holographic projection. A platform that offers versatile shaping of free-space emission, while maintaining the CMOS compatibility and monolithic integration of silicon photonics is in pressing need. Here we demonstrate a platform that integrates metasurfaces monolithically on silicon photonic integrated circuits. The metasurfaces consist of amorphous silicon nanopillars evanescently coupled to silicon waveguides. We demonstrate experimentally diffraction-limited beam focusing with a Strehl ratio of 0.82. The focused spot can be switched between two positions by controlling the excitation direction. We also realize a meta-hologram experimentally that projects an image above the silicon photonic chip. This platform can add a highly versatile interface to the existing silicon photonic ecosystems for precise delivery of free-space emission.
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