ArticleNanophotonics (Berlin, Germany)2023
Inverse design of high-NA metalens for maskless lithography.
Article in Nanophotonics (Berlin, Germany), 2023. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 10 papers.
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Who cites it
10 citing papers in PubMed.
- Full-space inverse-designed meta-optics for complex vector field shaping of intracavity landscapes.Light, science & applications · 2026Article
- Metalens-style image synthesis for metalens imaging via image-to-image translation.Scientific reports · 2026Article
- Review for optical metalens based on metasurfaces: fabrication and applications.Microsystems & nanoengineering · 2025Review
- Time-domain adjoint optimization for metalens design toward enhanced broadband efficiency and uniformity.iScience · 2025Article
- The Principle and Application of Achromatic Metalens.Micromachines · 2025Review
- Roll-to-plate printable RGB achromatic metalens for wide-field-of-view holographic near-eye displays.Nature materials · 2025Article
- Inverse design of color routers in CMOS image sensors: toward minimizing interpixel crosstalk.Nanophotonics (Berlin, Germany) · 2024Article
- Large-scale photonic inverse design: computational challenges and breakthroughs.Nanophotonics (Berlin, Germany) · 2024Review
- Inverse design and optical vortex manipulation for thin-film absorption enhancement.Nanophotonics (Berlin, Germany) · 2023Article
- Special issue: Metamaterials and plasmonics in Asia, a tribute to Byoungho Lee.Nanophotonics (Berlin, Germany) · 2023Article
Corrections and comments
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Authors and funding
5 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
We demonstrate an axisymmetric inverse-designed metalens to improve the performance of zone-plate-array lithography (ZPAL), one of the maskless lithography approaches, that offer a new paradigm for nanoscale research and industry. First, we derive a computational upper bound for a unit-cell-based axisymmetric metalens. Then, we demonstrate a fabrication-compatible inverse-designed metalens with 85.50% transmission normalized focusing efficiency at 0.6 numerical aperture at 405 nm wavelength; a higher efficiency than a theoretical gradient index lens design (79.98%). We also demonstrate experimental validation for our axisymmetric inverse-designed metalens via electron beam lithography. Metalens-based maskless lithography may open a new way of achieving low-cost, large-area nanofabrication.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.