ArticleSensors (Basel, Switzerland)2024
High-Precision Measurement Method for Small Angles Based on the Defect Spot Mode of the Position-Sensitive Detector.
Article in Sensors (Basel, Switzerland), 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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9 authors.
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Abstract
The paper proposes and verifies a small-angle measurement method based on the defect spot mode of the position-sensitive detector (PSD). With the output characteristics of the PSD in the defect spot mode and the size transformation properties of a focused beam, the measurement sensitivity can be significantly improved. Calibration experiments with the piezoelectric transducer (PZT) indicate that compared with the current PSD-based autocollimation method, the proposed method can improve the sensitivity of small-angle measurement by 57 times, and the measurement sensitivity of the proposed method can be further improved by optimizing the system parameters, while the proposed method has the advantages of a simple system and high real-time performance. Therefore, the proposed method is expected to be used in high-precision motion error detection, as well as in shape and position measurement.
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