Evidence map›Paper›PMID 39597145›Full record

ReviewMicromachines2024

A Review on Resonant MEMS Electric Field Sensors.

Guijie Wang, Pengfei Yang, Zhaozhi Chu, Lifang Ran, Jianhua Li, Bo Zhang, Xiaolong Wen

Abstract readReview
PubMed Full text at PMC Publisher
In one paragraph

Review in Micromachines, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

7 authors.

Guijie WangSchool of Mathematics and Physics, Beijing Weak Magnetic Testing and Applied Engineering Technology Research Center, University of Science and Technology Beijing, Beijing 100083, China.ORCID 0009-0005-1660-994X
Pengfei YangSchool of Applied Science, Beijing Information Science and Technology University, Beijing 100192, China.ORCID 0000-0002-0857-2383
Zhaozhi ChuInstitute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China.ORCID 0000-0003-3250-8928
Lifang RanSchool of Mathematics and Physics, Beijing Weak Magnetic Testing and Applied Engineering Technology Research Center, University of Science and Technology Beijing, Beijing 100083, China.
Jianhua LiSchool of Mathematics and Physics, Beijing Weak Magnetic Testing and Applied Engineering Technology Research Center, University of Science and Technology Beijing, Beijing 100083, China.
Bo ZhangSchool of Mathematics and Physics, Beijing Weak Magnetic Testing and Applied Engineering Technology Research Center, University of Science and Technology Beijing, Beijing 100083, China.
Xiaolong WenSchool of Mathematics and Physics, Beijing Weak Magnetic Testing and Applied Engineering Technology Research Center, University of Science and Technology Beijing, Beijing 100083, China.ORCID 0000-0001-7553-8778

Funding

National Natural Science Foundation of China No. 62031025
6 · The paper itself

Abstract

Electric field sensors (EFSs) are widely used in various fields, particularly in accurately assessing atmospheric electric fields and high-voltage power lines. Precisely detecting electric fields enhances the accuracy of weather forecasting and contributes to the safe operation of power grids. This paper comprehensively reviews the development of micro-electromechanical system (MEMS) resonant EFSs, including theoretical analysis, working principles, and applications. MEMS resonant EFSs have developed into various structures over the past decades. They have been reported to measure electric field strength by detecting changes in the induced charge on the electrodes. Significant advancements include diverse driving and sensing structures, along with improved dynamic range, sensitivity, and resolution. Recently, mode localization has gained attention and has been applied to electric field sensing. This paper reviews the performances and structures of MEMS resonant EFSs over recent decades and highlights recent advances in weakly coupled resonant EFSs, offering comprehensive guidance for researchers.

Indexed as

electric field sensorMEMS resonant EFSmicro-electromechanical systemsmode localizationresonator

Identifiers

PMID39597145
PMCPMC11596163

What OpenQuestion holds

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LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.