Silicon Microthermocycler for Point-of-Care Analytical Systems: Modeling, Design, and Fabrication.

A four-tether silicon microthermocycler for point-of-care PCR analytical systems is proposed. Substituting the commonly employed platinum with titanium in the fabrication of thin film resistance temperature detectors and heaters enabled the realization of a smaller device without compromising temperature accuracy or increasing heater lead power losses. The device was extensively analyzed through analytical modeling and FEM numerical simulations using a 3-D thermo-mechanical simulation model in COMSOL. Numerical simulations revealed that the four-tether design provides a 460% improvement in mechanical strength and a 57% reduction in the thermal time constant compared with a similar three-tether design, with a trade-off of a 22% increase in heat losses. Detailed structural and thermal analyses of crucial design parameters guided the optimization of the final geometry, leading to the successful fabrication of prototypes. It was shown that the current of 60 mA was sufficient to heat the fabricated solid and hollow silicon structure to 132 °C and 134 °C in 10 s for an applied heater power of 510 mW and 525 mW, respectively.