Evidence map›Paper›PMID 39581998›Full record

ArticleMicrosystems & nanoengineering2024

5.5 GHz film bulk acoustic wave filters using thin film transfer process for WLAN applications.

Tingting Yang, Chao Gao, Yaxin Wang, Binghui Lin, Yupeng Zheng, Yan Liu, Cheng Lei, Chengliang Sun, Yao Cai

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Microsystems & nanoengineering, 2024. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Scaling LLSAW filters on engineered LiNbOMicrosystems & nanoengineering · 2025
    Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

9 authors.

Tingting Yang *The Institute of Technological Sciences, Hubei Key Laboratory of Electronic Manufacturing and Packaging Integration, Wuhan University, 430072, Wuhan, China.
Chao Gao *The Institute of Technological Sciences, Hubei Key Laboratory of Electronic Manufacturing and Packaging Integration, Wuhan University, 430072, Wuhan, China.ORCID http://orcid.org/0000-0002-5170-3705
Yaxin WangThe Institute of Technological Sciences, Hubei Key Laboratory of Electronic Manufacturing and Packaging Integration, Wuhan University, 430072, Wuhan, China.
Binghui LinThe Institute of Technological Sciences, Hubei Key Laboratory of Electronic Manufacturing and Packaging Integration, Wuhan University, 430072, Wuhan, China.
Yupeng ZhengThe Institute of Technological Sciences, Hubei Key Laboratory of Electronic Manufacturing and Packaging Integration, Wuhan University, 430072, Wuhan, China.
Yan LiuThe Institute of Technological Sciences, Hubei Key Laboratory of Electronic Manufacturing and Packaging Integration, Wuhan University, 430072, Wuhan, China.
Cheng LeiThe Institute of Technological Sciences, Hubei Key Laboratory of Electronic Manufacturing and Packaging Integration, Wuhan University, 430072, Wuhan, China. leicheng@whu.edu.cn.
Chengliang SunThe Institute of Technological Sciences, Hubei Key Laboratory of Electronic Manufacturing and Packaging Integration, Wuhan University, 430072, Wuhan, China. sunc@whu.edu.cn.
Yao CaiThe Institute of Technological Sciences, Hubei Key Laboratory of Electronic Manufacturing and Packaging Integration, Wuhan University, 430072, Wuhan, China. caiyao999@whu.edu.cn.

Funding

National Science Foundation of China | Young Scientists Fund 62204177
6 · The paper itself

Abstract

Wireless local area network (WLAN) has gained widespread application as a convenient network access method, demanding higher network efficiency, stability, and responsiveness. High-performance filters are crucial components to meet these needs. Film bulk acoustic resonators (FBARs) are ideal for constructing these filters due to their high-quality factor (Q) and low loss. In conventional air-gap type FBAR, aluminum nitride (AlN) is deposited on the sacrificial layer with poor crystallinity. Additionally, FBARs with single-crystal AlN have high internal stress and complicated fabrication process. These limit the development of FBARs to higher frequencies above 5 GHz. This paper presents the design and fabrication of FBARs and filters for WLAN applications, combining the high electromechanical coupling coefficient (

Identifiers

PMID39581998
PMCPMC11586432

What OpenQuestion holds

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.