ArticleNature materials2025
Aluminium surface work hardening enables multi-scale 3D lithography.
Article in Nature materials, 2025. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 12 papers.
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Who cites it
12 citing papers in PubMed.
- Mechanism of Direct Acoustic Construction and Gradient Properties Tuning.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2026Article
- Cooperative Solvent-Thermal Interactions Enable Multi-Material Nanotransfer Printing for Multi-Dimensional Molecular Profiling.Small (Weinheim an der Bergstrasse, Germany) · 2026Article
- Neural Network Enabled Real-Time Plasma Imaging for Inverse Designed Fabrication of Micro/Nano Structures with Ultrafast Laser.Advanced materials (Deerfield Beach, Fla.) · 2026Article
- Systematic investigation of the LSPR characteristics in plasmonic nanoarrays.Microsystems & nanoengineering · 2026Article
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- Erasable and regenerated multicomponent patterned polymer brushes.Chemical science · 2026Article
- Bio-Inspired SA-FA Bionic Dual Receptor Electronic Skin for Intelligent Gesture and Material Cognition Systems Enhanced by Static-Dynamic Mutual Interaction.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- Revealing Dynamic Ion Transport in Tailorable Carbon Nano-Skyscraper Electrodes.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- Electrochemical Anodization for the Fabrication of Wafer-Scale p-Type Organic Permeable Base Transistors Arrays with MHz Operation.Advanced materials (Deerfield Beach, Fla.) · 2025Article
- Multi-Physical Lattice Metamaterials Enabled by Additive Manufacturing: Design Principles, Interaction Mechanisms, and Multifunctional Applications.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Review
- Direct laser 3D nanowriting of metals and their alloys.Nature materials · 2024Article
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Authors and funding
11 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Multi-scale structures are ubiquitous in biological systems. However, manufacturing man-made structures with controllable features spanning multiple length scales, particularly down to nanoscale features, is very challenging, which seriously impacts their collective properties. Here we introduce an aluminium-based three-dimensional lithography that combines sequential nano-micro-macro-imprinting and anodization of multi-scale anodic aluminium oxide templates to manufacture well-defined multi-scale structures, using various materials. The high-fidelity nano-patterns and micro-patterns were facilitated by the surface work hardening phenomenon, where the nano-patterns can be further fine-tailored by anodization to have high-aspect-ratio and tunable nano-holes. Based on the aluminium-based three-dimensional lithography, multi-scale materials across length scales of at least 10
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Registered trials
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